• Acta Photonica Sinica
  • Vol. 44, Issue 4, 405002 (2015)
MUHUTIJIANG Bilali1、2、*, QIU Ke-qiang1, ZHENG Yan-chang1, XU Xiang-dong1, and FU Shao-jun1
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    DOI: 10.3788/gzxb20154404.0405002 Cite this Article
    MUHUTIJIANG Bilali, QIU Ke-qiang, ZHENG Yan-chang, XU Xiang-dong, FU Shao-jun. Fabrication of Broadband Sinusoidal Gold-coated Gratings[J]. Acta Photonica Sinica, 2015, 44(4): 405002 Copy Citation Text show less

    Abstract

    In order to satisfy the requirements of large aperture broadband gold-coated gratings groove depth uniformity in the high-power laser system, Broadband sinusoidal gold-coated gratings with line densities of 1 740 lines /mm and groove depth of 210 nm have been successfully fabricated via the methods of trapezoidal grating-coating-deposition and holographic lithography-deposition. The average diffraction efficiency at the -1 order ( Littrow mount) is above 87% and the peak value is 90% for TM polarized light spanning wavelengths from 750 to 850 nm. The experimental results show that Gratings groove depth can be easily controlled. After removing the coated photoresist, the substrate could be reused. Diffraction efficiency and bandwidth meet the requirements of the domestic general broadband pulse compression gold-coated gratings.
    MUHUTIJIANG Bilali, QIU Ke-qiang, ZHENG Yan-chang, XU Xiang-dong, FU Shao-jun. Fabrication of Broadband Sinusoidal Gold-coated Gratings[J]. Acta Photonica Sinica, 2015, 44(4): 405002
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