• Acta Photonica Sinica
  • Vol. 50, Issue 6, 100 (2021)
Yanli LI1, Xin JIA2, Kaiqiang CAO1, Fengzhuo ZHANG1, Long CHEN1, and Tianqing JIA1
Author Affiliations
  • 1State Key Laboratory of Precision Spectroscopy, East China Normal University, Shanghai20024, China
  • 2School of Arts and Sciences, Shanghai Dianji University, Shanghai01306, China
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    DOI: 10.3788/gzxb20215006.0650111 Cite this Article
    Yanli LI, Xin JIA, Kaiqiang CAO, Fengzhuo ZHANG, Long CHEN, Tianqing JIA. Highly Efficient Fabrication of Superhydrophilic Structures on Silicon Surface by the Interference of Two Femtosecond Laser Beams[J]. Acta Photonica Sinica, 2021, 50(6): 100 Copy Citation Text show less
    Experimental setup for the two-beam interference of femtosecond laser
    Fig. 1. Experimental setup for the two-beam interference of femtosecond laser
    Micrographs of water droplet (1 μL) on a silicon surface in air
    Fig. 2. Micrographs of water droplet (1 μL) on a silicon surface in air
    Scanning electric microscope images of hybrid micro-nanostructures on silicon surface
    Fig. 3. Scanning electric microscope images of hybrid micro-nanostructures on silicon surface
    Micrographs of water droplet (1 μL) on silicon surface after laser ablation
    Fig. 4. Micrographs of water droplet (1 μL) on silicon surface after laser ablation
    The dependences of the contact angle and the surface roughness on the scanning speed
    Fig. 5. The dependences of the contact angle and the surface roughness on the scanning speed
    The dependence of the contact angle on the laser fluence
    Fig. 6. The dependence of the contact angle on the laser fluence
    High resolution X-ray photoelectron spectroscopy of O1s on a silicon surface
    Fig. 7. High resolution X-ray photoelectron spectroscopy of O1s on a silicon surface
    High resolution X-ray photoelectron spectroscopy of C1s on a silicon surface
    Fig. 8. High resolution X-ray photoelectron spectroscopy of C1s on a silicon surface
    Scanning speed5 mm/s4 mm/s3 mm/s2 mm/s
    Surface roughness23 nm62 nm101 nm148 nm
    Table 1. Surface roughness of silicon ablated at different scanning speeds
    Yanli LI, Xin JIA, Kaiqiang CAO, Fengzhuo ZHANG, Long CHEN, Tianqing JIA. Highly Efficient Fabrication of Superhydrophilic Structures on Silicon Surface by the Interference of Two Femtosecond Laser Beams[J]. Acta Photonica Sinica, 2021, 50(6): 100
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