• Optics and Precision Engineering
  • Vol. 18, Issue 12, 2543 (2010)
NI Qi-liang1,*, HE Ling-ping1, LIU Shi-jie1, DONG Ning-ning2, and CHEN Bo1
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    DOI: Cite this Article
    NI Qi-liang, HE Ling-ping, LIU Shi-jie, DONG Ning-ning, CHEN Bo. Extreme ultraviolet single photon-counting imaging system based on induced charge position-sensitive anode[J]. Optics and Precision Engineering, 2010, 18(12): 2543 Copy Citation Text show less

    Abstract

    A new prototype of two-dimensional photon-counting imaging system with an induced charge position-sensitive anode in extreme ultraviolet (EUV) region was developed for a moon-based EUV camera. The detector system is mainly composed of microchannel plate (MCP) stacks operating in a pulse-counting mode,a wedge-strip induced-charge position-sensitive anode and correlative analog and data processing circuits. A three-electrode wedge-strip induced-charge position-sensitive anode with a 1.5 mm period and a 47 mm diameter active area was designed and fabricated, and the front-end analog and data circuits with the maximum counting rate of 200 kHz were also developed. The operating characteristics of the prototype MCP detector including the background rate, pulse height distribution, gain, image linearity and the spatial resolution were measured. The measured results show that the spatial resolution has been 7.13 lp/mm(0.14 mm), which means it can completely satisfy the requirement of moon-based EUV camera for the spatial resolution.
    NI Qi-liang, HE Ling-ping, LIU Shi-jie, DONG Ning-ning, CHEN Bo. Extreme ultraviolet single photon-counting imaging system based on induced charge position-sensitive anode[J]. Optics and Precision Engineering, 2010, 18(12): 2543
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