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Photonics Research
Vol. 13, Issue 5, 1313 (2025)

Advancing photonic device capabilities via femtosecond laser modification of LPCVD-SiN microring resonator characteristics

Jia Du¹, Weixiao Xu^1,2,3, Runwei Zhou^1,2, Xiao Chen¹..., Ting Li¹, Xiongping Bao^1,2, Hong Wang^1,4, Weibiao Chen^1,2,3 and Libing Zhou^1,2,*|Show fewer author(s)

Author Affiliations

¹Wangzhijiang Innovation Center for Laser, Aerospace Laser Technology and System Department, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China

²Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China

³Hangzhou Institute for Advanced Study, University of Chinese Academy of Sciences, Hangzhou 310024, China

⁴Department of Optics and Optical Engineering, University of Science and Technology of China, Hefei 230026, China

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DOI: 10.1364/PRJ.550226 Cite this Article Set citation alerts

Jia Du, Weixiao Xu, Runwei Zhou, Xiao Chen, Ting Li, Xiongping Bao, Hong Wang, Weibiao Chen, Libing Zhou, "Advancing photonic device capabilities via femtosecond laser modification of LPCVD-SiN microring resonator characteristics," Photonics Res. 13, 1313 (2025) Copy Citation Text

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References

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Jia Du, Weixiao Xu, Runwei Zhou, Xiao Chen, Ting Li, Xiongping Bao, Hong Wang, Weibiao Chen, Libing Zhou, "Advancing photonic device capabilities via femtosecond laser modification of LPCVD-SiN microring resonator characteristics," Photonics Res. 13, 1313 (2025)

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