• Chinese Journal of Lasers
  • Vol. 35, Issue s2, 229 (2008)
Yu Yiting*, Yuan Weizheng, Wang Lanlan, Yan Bin, and Li Taiping
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  • [in Chinese]
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    Yu Yiting, Yuan Weizheng, Wang Lanlan, Yan Bin, Li Taiping. A New Microprogrammable Grating and Its Potential Application[J]. Chinese Journal of Lasers, 2008, 35(s2): 229 Copy Citation Text show less

    Abstract

    Based on the microelectromechanical systems (MEMS) technology, a new microprogrammable grating with its blazed angle electrostatically modulated was developed using a two-layer polysilicon surface micromachining process, which has a simple structure and a large tunable capability in its blazed angle. A pull-in voltage of 110~115 V, restoring voltage of 74~65 V, resonant frequency of ~78 kHz, adjusting time of ~12 μs, and maximum operational blazed angle of more than 5 ° were achieved. The measured results are basically consistent with the simulation. The possibility of using the new microprogrammable grating as an optical switch was discussed in detail. And a few recommendations were proposed for such application considering the existing problems of the grating.
    Yu Yiting, Yuan Weizheng, Wang Lanlan, Yan Bin, Li Taiping. A New Microprogrammable Grating and Its Potential Application[J]. Chinese Journal of Lasers, 2008, 35(s2): 229
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