Xiuhua FU, Kaifa REN, Ben WANG, Yonggang PAN, Zhaowen LIN, Jiulin SU, Suotao DONG, Gong ZHANG. Development of 10 μm~11 μm bandpass filter for surface temperature detection[J]. Journal of Applied Optics, 2024, 45(6): 1138
- Journal of Applied Optics
- Vol. 45, Issue 6, 1138 (2024)
Fig. 1. Spectral distribution curves of blackbody radiation
Fig. 2. Transmission spectra of single-layer film
Fig. 3. Refractive index dispersion distribution of thin-film materials
Fig. 4. Long-wavelength pass films design
Fig. 5. Short-wavelength pass films design
Fig. 6. Thickness and sensitivity of long-wavelength pass
Fig. 7. Thickness and sensitivity of short-wavelength pass
Fig. 8. Spectral transmittance curve of combined membrane system design
Fig. 9. Design and test spectra of long-wavelength pass films
Fig. 10. Design and test spectra of short-wavelength pass films
Fig. 11. Geometric diagram of rotary spherical fixture
Fig. 12. Relative film thickness distribution of rotary spherical workpiece plate
Fig. 13. Film thickness deposition motion trajectory of S-point
Fig. 14. Thickness errors of Ge film of long-wavelength and short-wavelength pass films
Fig. 15. Relation between monitored and actual thicknesses of ZnS film
Fig. 16. Sample prepared by experiment
Fig. 17. Measured transmittance curves
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Table 1. Optical and mechanical properties of Ge, PbTe, ZnSe, ZnS and YF3
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Table 2. Designed optical properties of bandpass filter film
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Table 3. Ion source process parameters
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Table 4. Deposition process parameters of Ge and ZnS films
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Table 5. Thickness errors at S-point position of Ge films
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Table 6. Correspondence between monitored and actual thicknesses of ZnS film
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Table 7. Spectrum test results
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