Jianing Dong, Jie Fan, Sida Mao, Yunping Lan, Yonggang Zou, Haizhu Wang, Jiabin Zhang, Xiaohui Ma. Effect of annealing on the damage threshold and optical properties of HfO2/Ta2O5/SiO2 high-reflection film[J]. Chinese Optics Letters, 2019, 17(11): 113101
- Chinese Optics Letters
- Vol. 17, Issue 11, 113101 (2019)
Fig. 1. Transmission spectra of the HR films at different annealing temperatures.
Fig. 2. Influence of annealing temperature on refractive index of
Fig. 3. XRD spectra of
Fig. 4. Influence of annealing temperature on
Fig. 5. Influence of annealing temperature on LIDT of HR films.
Fig. 6. Damaged morphologies of HR films under the laser energy density of
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Table 1. Ion Source Parameter during Deposition
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