Research on force sensors in a micro-friction test rig

[in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]

Journals >Optics and Precision Engineering >Volume 10 >Issue 4 >Page 388 > Article

Optics and Precision Engineering
Vol. 10, Issue 4, 388 (2002)

Research on force sensors in a micro-friction test rig

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[in Chinese]

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[in Chinese], [in Chinese], [in Chinese], [in Chinese]. Research on force sensors in a micro-friction test rig[J]. Optics and Precision Engineering, 2002, 10(4): 388 Copy Citation Text

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References

[4] Maarten P. A hinged-pad test structure for sliding friction measurement in micro-machine[J]. SPIE,1998,3512:241-250.

[5] Bharat B. Tribology on the macro-to nanoscales of MEMS materials:a review DSC[J].Micro-Electro-Mechanical Systems(MEMS),1998,66:265～266.

[in Chinese], [in Chinese], [in Chinese], [in Chinese]. Research on force sensors in a micro-friction test rig[J]. Optics and Precision Engineering, 2002, 10(4): 388

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