Xu HE, Hao YANG, Yuncan MA, Jun LI, Jun JIANG, Limin MENG, Yan YE. Core structure of terahertz filter fabricated by femtosecond laser with high repetition rate[J]. Journal of Applied Optics, 2024, 45(3): 514
- Journal of Applied Optics
- Vol. 45, Issue 3, 514 (2024)
Fig. 1. Structure design of 850 GHz band-pass filter
Fig. 2. Femtosecond laser processing technology platform and blowing-dust removal module
Fig. 3. Machining path and machining effect along step profile scanning
Fig. 4. Machining path and machining effect along vertical scanning direction
Fig. 5. Morphology of core structure under different blowing pressures
Fig. 6. Depth and morphology of core structure under different laser powers
Fig. 7. Depth and morphology of core structure at different scanning rates
Fig. 8. Depth and morphology of core structure under different scanning layers
Fig. 9. Depth and morphology of core structure under different Z-axis increments
Fig. 10. Core structure of terahertz filter processed by femtosecond laser
Fig. 11. Comparison of measured results and simulated results of THz filter performance
|
Table 1. Comparison of design values and measured values of THz filter core structure μm
Set citation alerts for the article
Please enter your email address
© Copyright 2018-2021 | Chinese Laser Press. All Rights Reserved 沪ICP备15018463号-20