Chang LU, Fengchuan XU, Yishen XU, Linsen CHEN, Yan YE. Interference lithography of space-variant grating structures by phase modulation[J]. Optics and Precision Engineering, 2022, 30(15): 1836

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- Optics and Precision Engineering
- Vol. 30, Issue 15, 1836 (2022)
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