[1] Hu Zhonghua, Yang Baoxi, Zhu Jing et al.. Pupil shaping techniques in high resolution projection exposure tools[J]. Laser & Optoelectronics Progress, 2011, 48(11): 111101

[2] Guo Liping, Huang Huijie, Wang Xiangzhao. Off-axis illumination for optical lithography[J]. Laser Journal, 2005, 26(1): 23～25

[3] Zhang Wei, Gong Yan. Vector analysis of diffractive optical elements for off-axis illumination of projection lithographic system[J]. Acta Optica Sinica, 2011, 31(10): 1005002

[4] Oliver Ripoll, Ville Kettunen, Hans Peter Herzig. Review of iterative Fourier-transform algorithms for beam shaping applications[J]. Opt. Engng., 2004, 43(11): 2549～2556

[5] Yan Shuhua. Design of Diffractive Micro-Optics[M]. Beijing: National Defense Industry Press, 2011. 66～76

[6] Zhang Wei, Gong Yan. Design of diffractive optical elements for off-axis illumination in projection lithography[J]. Optics and Precision Engineering, 2008, 16(11): 2081～2086

[7] R. W. Gerchberg, W. Q. Saxton. A practical algorithm for determination of phase from image and diffraction plane pictures[J]. Optik, 1972, 35(2): 237～246

[8] J. R. Fineup. Iterative method applied to image reconstruction and to computer generated holograms[J]. Opt. Engng., 1980, 19: 297～306

[9] V. A. Soifer, V. V. Kotlyar, L. L. Doskolovich. Iterative Methods for Diffractive Optical Elements Computation[M]. London: Taylor & Francis, 1997. 60～68

[10] F. Wyrowski, O. Bryndahl. Iterative Fourier-transform algorithm applied to computer holography[J]. J. Opt. Soc. Am. A, 1986, 5(7): 1058～1065

[11] Yu Xiaochen, Hu Jiasheng, Wang Lianbao. New methods for improving the quality of laser beam shaping[J]. Chinese J. Lasers, 2012, 39(1): 0116002

[12] Dong Wang, Jian Zhang, Hongxin Zhang. Adaptive-weight iterative algorithm for flat-top laser beam shaping[J]. Opt. Engng., 2012, 51(7): 074301

[13] Jiang Pengzhi, Ma Haotong, Yuan Lingfeng et al.. Shaped beam of arbitrary size with adaptive optics based on stochastic parallel gradient descent algorithm[J]. Chinese J. Lasers, 2011, 38(12): 1202008

[14] Harry J. Levinson. Principles of Lithography[M]. Bellingham: SPIE Press, 2010. 160～161

[15] Burn J. Lin. Optical Lithography: Here Is Why[M]. Bellingham: SPIE Press, 2009. 139～140

[16] J. S. Liu, M. R. Taghizadeh. Iterative algorithm for the design of diffractive phase elements for laser beam shaping[J]. Opt. Lett., 2002, 27(16): 1463～1465