Qian Wang, Wei-Guo Liu, Lei Gong, Li-Guo Wang, Ya-Qing Li, Rong Liu. Theoretical study on influence of photon reabsorption on photocarrier radiometric characteristics of silicon wafers [J]. Acta Physica Sinica, 2019, 68(4): 047201-1
- Acta Physica Sinica
- Vol. 68, Issue 4, 047201-1 (2019)
Fig. 1. Schematic diagram of PCR technique.PCR技术原理示意图
Fig. 2. Absorption coefficients
BB and
FCA for a silicon wafer and a simulated PL without PR.
单晶硅样品的带间吸收系数和自由载流子吸收系数及仿真的未考虑PR效应的PL谱
Fig. 3. Influence of PR on PCR signal: (a) Amplitude; (b) phase; (c) relative error.PR对PCR信号的影响 (a)振幅; (b)相位; (c)相对误差
Fig. 4. Influence of PR on PL spectrum: (a) Amplitude; (b) phase.重吸收对PL谱的影响 (a)振幅; (b)相位
Fig. 5. (a) Vertical excess carrier density distribution and (b) mean depth as a function of the modulation frequency at r = 0 μm.
r = 0 μm时 (a) 过剩载流子浓度纵向分布; (b)平均深度与调制频率的关系
Fig. 6. Influence of PR on PCR signal for silicon wafers with different carrier lifetimes.载流子寿命变化时, PR效应对PCR信号的影响
Fig. 7. Influence of PR on PCR signal for silicon wafers with different diffusion coefficients.载流子扩散系数变化时, PR效应对PCR信号的影响
Fig. 8. Influence of PR on PCR signal for silicon wafers with different front surface recombination velocities.前表面复合速率变化时, PR效应对PCR信号的影响
Fig. 9. Influence of PR on PCR signal for silicon wafers with different doping densities.掺杂浓度变化时, PR效应对PCR信号的影响
Fig. 10. Influence of PR on the fitted electronic transport parameters for p-type silicon wafers: (a)
; (b) D ; (c) S 1.
p型单晶硅中PR对拟合的电子输运参数的影响 (a)
; (b) D ; (c) S 1
Fig. 11. Influence of PR on the fitted electronic transport parameters for n-type silicon wafers: (a)
; (b) D ; (c) S 1.
n型单晶硅中PR对拟合的电子输运参数的影响 (a)
; (b) D ; (c) S 1
Fig. 12. Influence of PR on PCR signal with and without the filter.加入滤光片前后PR对PCR信号的影响
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