[4] Schmidt J. Surface passivation of silicon solar cells using plasma-enhanced chemical-vapour-deposited SiN films and thin thermal SiO2/plasma SiNx stacks[J].Semicond.Sci.Technol.,2001,16(1):164-170.
[6] Glunz S W, Biro D, Rein S, et al. Field-effect passivation of the SiO2-Si interface[J].Appl. Phys.,1999,86 (1):683-691.