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    Journals >International Journal of Extreme Manufacturing >Volume 1 >Issue 1 >Page 12003 > Article
    • International Journal of Extreme Manufacturing
    • Vol. 1, Issue 1, 12003 (2019)
    Hybrid femtosecond laser three-dimensional micro-and nanoprocessing: a review
    Koji Sugiok*
    Author Affiliations
  • RIKEN Center for Advanced Photonics, Wako, Saitama 351-0198, Japan
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    DOI: 10.1088/2631-7990/ab0eda Cite this Article
    Koji Sugiok. Hybrid femtosecond laser three-dimensional micro-and nanoprocessing: a review[J]. International Journal of Extreme Manufacturing, 2019, 1(1): 12003 Copy Citation Text show less
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    Koji Sugiok. Hybrid femtosecond laser three-dimensional micro-and nanoprocessing: a review[J]. International Journal of Extreme Manufacturing, 2019, 1(1): 12003
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