• Optics and Precision Engineering
  • Vol. 26, Issue 3, 531 (2018)
ZHANG Shan1, WANG Lei2, and L Ying-jun1
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    DOI: 10.3788/ope.20182603.0531 Cite this Article
    ZHANG Shan, WANG Lei, L Ying-jun. Laser direct writing for binary patterns during accelerating and decelerating motion of scanning stage[J]. Optics and Precision Engineering, 2018, 26(3): 531 Copy Citation Text show less
    References

    [1] WANG D SH, LUO CH T, XIONG Y Q, et al.. Fabrication technology of the centrosymmetric continuous relief diffractive optical elements[J]. Physics Procedia, 2011, 18: 95-99.

    [2] HUANG Y Q, HUANG R, LIU Q L, et al.. Realization of III-V semiconductor periodic nanostructures by laser direct writing technique[J]. Nanoscale Research Letters, 2017, 12: 12.

    [3] TONG Q C, LUONG M H, TRAN T M, et al.. Realization of desired plasmonic structures via a direct laser writing technique[J]. Journal of Electronic Materials, 2017, 46(6): 3695-3701.

    [4] LUO ZH, WANG C, YIN K, et al.. Rapid fabrication of cylindrical microlens array by shaped femtosecond laser direct writing[J]. Applied Physics A, 2016, 122(7): 633.

    [5] FENG X G, ZHANG G, TANG Y. Electromagnetic shielding properties of metallic mesh coatings[J]. Opt. Precision Eng., 2015, 23(3): 686-691. (in Chinese)

    [6] LIU D X, XIA H, SUN Y L, et al.. Femtosecond laser direct writing bio-gel template for in situ synthesis of nanoparticles[J]. Chinese Optics, 2014, 7(4): 608-615. (in Chinese)

    [7] CAI ZH X, ZENG X Y. Development and applications of laser micro cladding[J]. Chinese Journal of Optics and Applied Optics, 2010, 3(5): 405-414. (in Chinese)

    [8] CHEN L S, SHAO J, WANG X H, et al.. A new laser direct writing method of binary beam-shaping element[J]. Acta Photonica Sinica, 2005, 34(3): 346-349. (in Chinese)

    [9] YU Y H, TIAN ZH N, JIANG T, et al.. Fabrication of large-scale multilevel phase-type Fresnel zone plate arrays by femtosecond laser direct writing[J]. Optics Communications, 2016, 362: 69-72.

    [10] GALE M T, ROSSI M, PEDERSEN J, et al.. Fabrication of continuous-relief micro-optical elements by direct laser writing in photoresists[J]. Optical Engineering, 1994, 33(11): 3556-3566.

    [11] VICH V P, et al.. Polar coordinate laser pattern generator for fabrication of diffractive optical elements with arbitrary structure[J]. Applied Optics, 1999, 38(8): 1295-1301.

         POLESHCHUK A G, CHURIN E G, KORONKE

    [12] HARUNA M, YOSHIDA S, TODA H, et al.. Laser-beam writing system for optical integrated circuits[J]. Applied Optics, 1987, 26(21): 4587-4592.

    [13] BECKER H, CASPARY R, CTOEPFER C, et al.. Low-cost direct writing lithography system for the sub-micron range[J]. Journal of Modern Optics, 1997, 44(9): 1715-1723.

    [14] QIU CH K, DU CH L, HOU D SH. Research on the technologies for laser direct writing[J]. Opto-Electronic Engineering, 1997, 24(S1): 36-40, 45. (in Chinese)

    [15] RUNG S, REXHEPI M, BISCHOFF C, et al.. Laserscribing of thin films using top-hat laser beam profiles[J]. Journal of Laser Micro/Nanoengineering, 2013, 8(3): 309-314.

    ZHANG Shan, WANG Lei, L Ying-jun. Laser direct writing for binary patterns during accelerating and decelerating motion of scanning stage[J]. Optics and Precision Engineering, 2018, 26(3): 531
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