[6] AKIYAMA M, KAMOHARA T, KANO K, et al.. Enhancement of piezoelectric response in scandium aluminum nitride alloy thin films prepared by dual reactive cosputtering [J]. Advanced Materials, 2009, 21(5): 593-596.
[7] DUBOIS M A, MURALT P. Stress and piezoelectric properties of aluminum nitride thin films deposited onto metal electrodes by pulsed direct current reactive sputtering [J]. Journal of Applied Physics, 2001, 89(11): 6389.
[8] FICHTNER S, WOLFF N, KRISHNAMURTHY G, et al.. Identifying and overcoming the interface originating c-axis instability in highly Sc enhanced AlN for piezoelectric micro-electromechanical systems [J]. Journal of Applied Physics, 2017, 122(3): 1051-276.
[9] KAMOHARA T, AKIYAMA M, UENO N, et al.. Growth of highly c-axis-oriented aluminum nitride thin films on molybdenum electrodes using aluminum nitride interlayers [J]. Journal of Crystal Growth, 2005, 275(3-4): 383-388.