• Chinese Journal of Lasers
  • Vol. 40, Issue 6, 603003 (2013)
Xu Gang*, Dai Yutang, and Xiao Xiang
Author Affiliations
  • [in Chinese]
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    DOI: 10.3788/cjl201340.0603003 Cite this Article Set citation alerts
    Xu Gang, Dai Yutang, Xiao Xiang. Study on Mathematical Modeling and Experiment of Ultrashort Laser Polishing Micro-Processing[J]. Chinese Journal of Lasers, 2013, 40(6): 603003 Copy Citation Text show less

    Abstract

    As one of the ultra-precision machining tools, 157 nm laser is an ideal means of surface micro-machining for hard and brittle materials. By establishing the mathematical model, the effects of the process parameters on the etched surface roughness (Ra) are discussed for laser polishing of materials. The roughness calculation formula is derived by using the least squares method. Experimental studies on polishing micro-processing of LED-GaN semiconductor films have been performed using excimer laser with 157 nm wavelength. Through the comparison of multiple sets of theoretical and experimental roughness values, there is an error between them, but the relative errors are all below 15%, and the smallest relative error is only 4%. For 157 nm laser spanning, the ablated surface with lower roughness can be obtained when the laser repetition rate is lower than 15 Hz and the scanning velocity is higher than 0.7 mm/min. The mathematical model can reasonably explain the groove formation mechanism of the etched GaN surface, which provides a theoretical basis to improve the processing quality.
    Xu Gang, Dai Yutang, Xiao Xiang. Study on Mathematical Modeling and Experiment of Ultrashort Laser Polishing Micro-Processing[J]. Chinese Journal of Lasers, 2013, 40(6): 603003
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