Preionization near Anode Improves Homgenity of Discharge in an Excimer Laser

[in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]

Journals >Chinese Journal of Lasers >Volume 22 >Issue 3 >Page 199 > Article

Chinese Journal of Lasers
Vol. 22, Issue 3, 199 (1995)

Preionization near Anode Improves Homgenity of Discharge in an Excimer Laser

[in Chinese], [in Chinese], [in Chinese], [in Chinese], and [in Chinese]

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[in Chinese]

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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Preionization near Anode Improves Homgenity of Discharge in an Excimer Laser[J]. Chinese Journal of Lasers, 1995, 22(3): 199 Copy Citation Text

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Abstract

The preionization near anode was suggestted in stead of preionization near cathode and experiments show that preionization near anode has improved both discharge homogenity and pulse energy output.

Keywords

homgenity of discharge preionization excimer laser

[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Preionization near Anode Improves Homgenity of Discharge in an Excimer Laser[J]. Chinese Journal of Lasers, 1995, 22(3): 199

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