Lithography and Reactive Ion Etching of Silicon-Based Photon Crystal Slab

[in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]

Journals >Opto-Electronic Engineering >Volume 31 >Issue 2 >Page 1 > Article

Opto-Electronic Engineering
Vol. 31, Issue 2, 1 (2004)

Lithography and Reactive Ion Etching of Silicon-Based Photon Crystal Slab

[in Chinese]^1、2, [in Chinese]¹, [in Chinese]², [in Chinese]¹, [in Chinese]¹, [in Chinese]¹, and [in Chinese]¹

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²[in Chinese]

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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Lithography and Reactive Ion Etching of Silicon-Based Photon Crystal Slab[J]. Opto-Electronic Engineering, 2004, 31(2): 1 Copy Citation Text

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