YANG Xinlei, MI Qian, GONG Lirong, ZHOU Fenglin. Magnetic Field Design and Simulation of Cylindrical Magnetron Sputtering Target[J]. Journal of Synthetic Crystals, 2021, 50(9): 1765

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- Journal of Synthetic Crystals
- Vol. 50, Issue 9, 1765 (2021)
Abstract

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