In order to realize the edge recognition for micro-accessory, a new complex edge recognition algorithm for micro-accessory is proposed based on the process characteristics of micro-accessory. By extracting the edge transitional region of different micro-accessories,and the polynomial regression mathematical models of transitional region are established.Then, the accurate position is obtained by process characteristics from the mathematics model. The experimental results indicate that the measurement error of 1 mm standard gauge block is 0.395 μm. After analysing the model for micro-fabrication,it comes to a conclusion that the process characteristics have greater influences on the edge of micro-accessory, so the edge recognition of micro-accessory should consider the influences of process characteristics. Proposed algorithm has considered the effects by processing characteristics and has induced a statistical scheme,so that the edge recognition result can reach to the sub-pixel level by establishing the mathematics model of transitional region. The algorithm also can offer a wide single-pixel and continuous edge,which can meet the precision measurement requirements.