[1] GALLARDO-HEREDIA S A, FLORES-GARCIA J C, TRUJILLO-VZQUEZ E, et al. Taguchi experimental design for films/coatings optimization of (NH4)2SiF6, (NH4)3AlF6, NH4AlF4 phases on aluminum sheet substrates by HYSY-CVD route[C]//2014-Sustainable Industrial Processing Summit. Flogen Star Outreach, 2014, 5: 241-256.
[2] OGAWA H, ARAI T, YANAGISAWA M, et al. Dry cleaning technology for removal of silicon native oxide employing hot NH3/NF3 exposure[J]. Japanese Journal of Applied Physics, 2002, 41(Part 1, No.8): 5349-5358.
[4] KALEM S. Synthesis of ammonium silicon fluoride cryptocrystals on silicon by dry etching[J]. Applied Surface Science, 2004, 236(1/2/3/4): 336-341.
[13] RASTOGI N K, RASHMI K R. Optimisation of enzymatic liquefaction of mango pulp by response surface methodology[J]. European Food Research and Technology, 1999, 209(1): 57-62.
[14] HU B, ZHOU K, LIU Y T, et al. Optimization of microwave-assisted extraction of oil from tiger nut (Cyperus esculentus L.) and its quality evaluation[J]. Industrial Crops and Products, 2018, 115: 290-297.
[17] DRAPER N R. Response surface methodology: process and product optimization using designed experiments[J]. Journal of Statistical Planning and Inference, 1997, 59(1): 185-186.
[24] JESIONOWSKI T, KRYSZTAFKIEWICZ A, URAWSKA J, et al. Novel precipitated silicas: an active filler of synthetic rubber[J]. Journal of Materials Science, 2009, 44(3): 759-769.