LI Yu-xin, CHEN De-yong, WANG Jun-bo, JIAO Hai-long, LUO Zhen-yu. H type micro-machined resonant pressure sensor based on self-stopped etch technique[J]. Optics and Precision Engineering, 2011, 19(12): 2927

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- Optics and Precision Engineering
- Vol. 19, Issue 12, 2927 (2011)
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