Yan-hong LI, Shuai YANG, Shun TANG, Wei-qian ZHAO, Li-rong QIU. Detecting divided aperture laser differential confocal radius measurement[J]. Optics and Precision Engineering, 2021, 29(10): 2287
- Optics and Precision Engineering
- Vol. 29, Issue 10, 2287 (2021)
Fig. 1. Detecting divided aperture laser differential confocal radius measuring principle
Fig. 2. Principle for off-axis differential detection using D-type aperture
Fig. 3. Virtual pinhole location algorithm
Fig. 4. Fixed focus sensitivity changes with v M
Fig. 5. Variation of fixed focus sensitivity with pinhole's radius
Fig. 6. Detecting divided aperture laser differential confocal radius measurement instrument
Fig. 7. Differential confocal curves of cat's eye point and confocal points
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Table 1. Comparison of repeated measurement results of radius of curvature
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