Research on Fabrication and Optical Performance Testing of Silicon Microlenses Array with Large F/ Number

[in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]

Journals >Chinese Journal of Lasers >Volume 27 >Issue 12 >Page 1097 > Article

Chinese Journal of Lasers
Vol. 27, Issue 12, 1097 (2000)

Research on Fabrication and Optical Performance Testing of Silicon Microlenses Array with Large F/ Number

[in Chinese]¹, [in Chinese]¹, [in Chinese]¹, [in Chinese]¹, and [in Chinese]²

Author Affiliations

¹[in Chinese]

²[in Chinese]

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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Research on Fabrication and Optical Performance Testing of Silicon Microlenses Array with Large F/ Number[J]. Chinese Journal of Lasers, 2000, 27(12): 1097 Copy Citation Text

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References

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[3] S.Haselbeck,H.Schreiber,J.Schwider et al..Microlenses fabricated by melting a photoresist on a base layer.Opt.Eng.,1993,32(6):1322～1324

[4] T.R.Jay,M.B.Stern.Preshaping photoresist for refractive microlens fabrication.Opt.Eng.,1994,33(11): 3552～3555

[5] Lars Erdmann,Dirk Efferenn.Technique for monolithic fabrication of silicon microlenses with selectable rim angles.Opt.Eng.,1997,36(4):1094～1098

[7] Zhang Xinyu,Yi Xinjian,He Miao et al..128×128 element silicon microlens array fabricated by ion beam etching for PtSi IRCCD.SPIE,1998,3551:191～198