• Optics and Precision Engineering
  • Vol. 12, Issue z2, 217 (2004)
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  • [in Chinese]
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    [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Design and finite element analysis of magnetic levitation precision stage[J]. Optics and Precision Engineering, 2004, 12(z2): 217 Copy Citation Text show less

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    [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Design and finite element analysis of magnetic levitation precision stage[J]. Optics and Precision Engineering, 2004, 12(z2): 217
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