As a voltage control device, the stability of piezoelectric ceramic drive power supply is seriously affected by the change of load capacitance. According to the dynamic characteristics of load equivalent capacitance under the change of driving voltage, a piezoelectric driving power supply based on capacitive load is proposed for the first time. The power supply combines RC pre-filtering and capacitive advanced feedback, which can improve the stability and the robustness of the power supply. The analysis results show that the optimized driving power supply with rated load of 1.5 μF has good dynamic performance within 0~3 μF, and the output voltage accuracy reaches 0.7 mV.