• Chinese Journal of Lasers
  • Vol. 39, Issue s2, 209011 (2012)
Niu Dongjie1、2、*, Lü Hao1, Zhang Qingyue1、2, Zhao Qiuling1, and Wang Xia1
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    DOI: 10.3788/cjl201239.s209011 Cite this Article Set citation alerts
    Niu Dongjie, Lü Hao, Zhang Qingyue, Zhao Qiuling, Wang Xia. Study of Computer Simulation on Chiral Spiral Structure Based on Multi-Beam Interference Lithography[J]. Chinese Journal of Lasers, 2012, 39(s2): 209011 Copy Citation Text show less

    Abstract

    Based on multi-beam interference theory, the chiral spiral structure by interference lithography is simulated, and several factors that can influence the structures are discussed. The simulation results indicate that there are different special effects of incident angle, polarization status, polarization direction and phase difference on the three-dimensional spiral structures. The computer simulation of photonic crystal provides an effective guidance for the experimental fabrication, and promotes the development and applications of chiral spiral structures.
    Niu Dongjie, Lü Hao, Zhang Qingyue, Zhao Qiuling, Wang Xia. Study of Computer Simulation on Chiral Spiral Structure Based on Multi-Beam Interference Lithography[J]. Chinese Journal of Lasers, 2012, 39(s2): 209011
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