[1] ZHAO C S.Ultrasonic motors technologies and application［M］.Berlin Heidelberg:Springer-Verlag,2011.

[2] DEVASIA S,ELEFTHERIOU E,MOHEIMANI S.A survey of control issues in nanopositioning［J］.IEEE Transactions on Control Systems Technology,2007,15(5):802-823.

[3] ZHANG Y,LU T F,AL-SARAWI S.Formulation of a simple distributed-parameter model of multilayer piezoelectric actuators［J］. Journal of Intelligent Material Systems & Structures,2016,27(11):426-430.

[4] LI X L,YAO Z Y.Analytical modeling and experimental validation of a V-shape piezoelectric ultrasonic transducer［J］.Smt Mat Stru,2016(26):075026-075033.

[6] SHI Y L,ZHANG H L,LI Y B,et al.Two DOF positioning stage using linear ultrasonic motors［J］.Transactions of Nanjing University of Aeronautics & Astronautics,2008,25(3):161-168.