Structure and microwave properties analysis of substrate removed GaAs/AlGaAs electro-optic modulator structure by finite element method

Kambiz ABEDI; Habib VAHIDI

doi:10.1007/s12200-012-0296-4

[1] Rahman BMA, Haxha S. Optimization of microwave properties for ultrahigh-speed etched and unetched lithium niobate electrooptic modulators. IEEE Journal of Lightwave Technology, 2002, 20(10): 1856-1863

[2] Gorman T, Haxha S. Thin layer design of X-cut lithium niobate electrooptic modulator with slotted SiO2 substrate. IEEE Photonics Technology Letters, 2008, 20(2): 111-113

[3] Gorman T, Haxha S. Design optimization of Z-cut lithium niobate electrooptic modulator with profiled metal electrodes and waveguides. IEEE Journal of Lightwave Technology, 2007, 25(12): 3722-3729

[4] Obayya S S A, Haxha S, Rahman B M A, Grattan K T. Numerical modeling of polarization conversion in semiconductor electro-optic modulators. Applied Optics, 2005, 44(6): 1032-1038

[5] Haxha S, Rahman B M A, Obayya S S A, Grattan K T. Velocity matching of a GaAs electro-optic modulator. Applied Optics, 2003, 42(36): 7179-7187

[6] Cui Y S, Berini P. Modeling and design of GaAs traveling-wave electrooptic modulators based on the planar microstrip structure. IEEE Journal of Lightwave Technology, 2006, 24(6): 2368-2379

[7] Gorman T, Haxha S, Ju J J. Ultra-high-speed deeply etched electrooptic polymer modulator with profiled cross section. IEEE Journal of Lightwave Technology, 2009, 27(1): 68-76

[8] Shin J, Ozturk C, Sakamoto S R, Chiu Y J, Dagli N. Novel T-rail electrodes for substrate removed low-voltage high-speed GaAs/AlGaAs electrooptic modulators. IEEE Transactions on Microwave Theory and Techniques, 2005, 53(2): 636-643

[9] Shin J, Wu S, Dagli N. 35-GHz bandwidth, 5-V-cm drive voltage bulk GaAs substrate removed electrooptic modulators. IEEE Photonics Technology Letters, 2007, 19(18): 1362-1364

[10] Shin J, Wu S, Dagli N. Bulk undoped GaAs-AlGaAs substrateremoved electrooptic modulators with 3.7 V-cm drive voltage at 1.55 μm. IEEE Photonics Technology Letters, 2006, 18(21): 2251-2253

[11] Koshiba M, Tsuji Y, Nishio M. Finite-element modeling of broadband traveling-wave optical modulators. IEEE Transactions on Microwave Theory and Techniques, 1999, 47(9): 1627-1633

[12] Koshiba M, Maruyama S, Hirayama K. A vector finite element method with the high-order mixed-interpolation-type triangular elements for optical waveguide problems. IEEE Journal of Lightwave Technology, 1994, 12(3): 495-502

[13] Pantic Z, Mittra R. Quasi-TEM analysis of microwave transmission lines by the finite-element method. IEEE Transactions on Microwave Theory and Techniques, 1986, 34(11): 1096-1103