Study on fabrication process of micro-bridge structure arrays based on amorphous silicon films

Huan Liu; Shanshan Wang; Changlong Cai; Shun Zhou; Weiguo Liu

doi:10.3788/COL201008s1.0218

Journals >Chinese Optics Letters >Volume 8 >Issue s1 >Page 218 > Article

Chinese Optics Letters
Vol. 8, Issue s1, 218 (2010)

Study on fabrication process of micro-bridge structure arrays based on amorphous silicon films

Huan Liu¹, Shanshan Wang², Changlong Cai¹, Shun Zhou¹, and Weiguo Liu¹

Author Affiliations

¹Micro-Optoelectrical System Laboratory, Xi'an Technological University, Xi'an 710032, China

²Xi'an Technological University North Institute of Information Engineering, Xi'an 710025, China

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DOI: 10.3788/COL201008s1.0218 Cite this Article Set citation alerts

Huan Liu, Shanshan Wang, Changlong Cai, Shun Zhou, Weiguo Liu. Study on fabrication process of micro-bridge structure arrays based on amorphous silicon films[J]. Chinese Optics Letters, 2010, 8(s1): 218 Copy Citation Text

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References

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[2] P. W. Kruse and D. D. Skatrud, Uncooled Infrared Imaging Arrays and Systems, Semiconductors and Semimetals (Academic Press Limited, New York, 1997).

[3] P. W. Kruse, Uncooled Infrared Focal Plane Arrays, Proc. SPIE 2552, 556 (1995).

[4] J. Kreider, P. Houard, C. Li, and T. Fitzgibbons, Laser Focus World 33, 139 (1997).

[5] S. Horn, D. Lohrmanm J. Campbell, P. Perconti, and R. Balcerack, Proc. SPIE, 4369, 210 (2001).

[6] M. H. Unewisse, B. I. Craig, R. J. Watson, O. Renhold, and K. C. Liddiard, Proc. SPIE 2554, 43 (1995).

[7] K. C. Liddiard, Proc. SPIE 2746, 72 (1996).

Data from CrossRef

[1] Huan Liu, Wei Guo Liu, Chang Long Cai, Shun Zhou. A Novel Method for the Fabrication of Infrared Focal Plane Arrays Based on the Amorphous Silicon. Materials Science Forum, 663-665, 1183(2010).

[2] Huan Liu, Liang Song, Shun Zhou, Chang Long Cai. Thin Metal Films and Multi-Layers Structure as Absorbers for Infrared Detectors. Materials Science Forum, 663-665, 352(2010).

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