Compared with common organic-inorganic materials, side chain bonded organic-inorganic material has better thermo-stability, and can avoid crystallization and phase separation. And the relaxation of ordered polarized chromophore is restricted as the movement of chromophore is blocked. A kind of stable, good-performance side chain bonded organic-inorganic material was compounded and applied as the electro-optic layer.Conventional semiconductor processing was applied to fabricate strip-loaded waveguide structure and the Mach-Zehnder(M-Z) electro-optic modulators were made.Response signal of 10 kHz was observed at 1 550 nm light source.