[1] CHO K S,MANDAL P,KIM K,et al. Improved efficiency in GaAs solar cells by 1D and 2D nanopatterns fabricated by laser interference lithography[J]. Optics Communications,2011,284(10/11): 2608-2612.
[2] BERENDSEN C W J,SKEREN M,NAJDEK D,et al. Superhydrophobic surface structures in thermoplastic polymers by interference lithography and thermal imprinting[J]. Applied Surface Science,2009,255(23): 9305-9310.
[3] XU D,CHEN K P,OHLINGER K,et al. Nanoimprinting lithography of a two-layer phase mask for three-dimensional photonic structure holographic fabrications via single exposure[J]. Nanotechnology,2011,22(3): 5303-5308.
[4] TRUSKETT V N,MICHAEL P C W. Trends in imprint lithography for biological applications[J]. Trends in Biotechnology,2008,24(7): 312-317.
[8] WATT F,BREESE M B H,BETTIOL A A,et al. Proton beam writing[J]. Materials Today,2007,10(6): 20-29.
[9] XU Hong-bo,LU Nan,QI Dian-peng,et al. Broadband antireflective Si nanopillar arrays produced by nanosphere lithography[J]. Microelectronic Engineering,2009,86(46): 850-852.
[10] DINELLI F,MENOZZI C,BASCHIERI P,et al. Scanning probe nanoimprint lithography[J]. Nanotechnology,2010,21(7): 5305-5310.
[12] ADAMS J,TIZAZU G,STEFAN J,et al. Large-area nanopatterning of self-assembled monolayers of alkanethiolates by interferometric lithography [J]. Langmuir,2010,26(16): 13600-13606.
[14] JOHANNES D B,NADINE G,WITTEMANN J V,et al. Sub-100 nm silicon nanowires by laser interference lithography and metal-assisted etching[J]. Nanotechnology,2010,21(9): 95302.
[15] SPALLAS J P,BOYD R D,BRITTEN J A,et al. Fabrication of sub-0.5um diameter cobalt dots on silicon substrates and photoresist pedestals on 50 cm×50 cm glass substrates using laser interference lithograph[J]. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures,1996,14(3): 2005-2007.
[22] XU Jia,WANG Zuo-bin,WENG Zhan-kun,et al. Laser interference nanolithography with a 405nm fiber semiconductor laser[J]. Key Engineering Materials,2013,552: 262-267.
[23] KIM T U,KIM J A,PAWAR S M,et al. Creation of nanoscale two-dimensional patterns of ZnO nanorods using laser interference lithography followed by hydrothermal synthesis at 90℃[J]. Crystal Growth & Design,2010,10: 4256.