• Chinese Journal of Lasers
  • Vol. 12, Issue 8, 492 (1985)
[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], and [in Chinese]
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  • [in Chinese]
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    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Measurement of local solid temperature by laser Raman spectroscopy[J]. Chinese Journal of Lasers, 1985, 12(8): 492 Copy Citation Text show less

    Abstract

    Local temperature of solid surface can be obtained by the intonsity ratio between Stokes Bumnn scattering and anti-Stokcs Banian scattering from samples. It is a real time temperature measurement without touching the object. It needs no calibration, but derives from spectroscopic measurement. It meets the requirements of surface physics and new technology development of VLSI. A steady state measurement using a low power laser has been achieved. The analysis and correction of its errors are given.
    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Measurement of local solid temperature by laser Raman spectroscopy[J]. Chinese Journal of Lasers, 1985, 12(8): 492
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