Study on laser-CCD microdisplacement sensors for vibration measurements

[in Chinese]; [in Chinese]; [in Chinese]

Abstract

This paper presents the principle and the method of vibration measurements by means of laser-CCD microdisplacomcnt sensors.This measurement technique can be applied for larger amplitudes (>60 μm). In 60~800 μm range, the absolute maximum error is <10 μm, and the relative error <6%.