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    Journals >Optics and Precision Engineering >Volume 15 >Issue 9 >Page 1383 > Article
    • Optics and Precision Engineering
    • Vol. 15, Issue 9, 1383 (2007)
    Structure design and test for guide unloading system of large ultra-precision machine
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    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Structure design and test for guide unloading system of large ultra-precision machine[J]. Optics and Precision Engineering, 2007, 15(9): 1383 Copy Citation Text show less
    References

    [4] HAHN P O.The 300 mm silicon wafer-A cost and technology challenge[J].Microelectronic Engineering,2001,56(3):3-13.

    [5] STOUTK I,BARRANS S M.The design of aerostatic bearings for application to nanometer resolution manufacturing machine system[J].Tribology International,2000,33:803-809.

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    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Structure design and test for guide unloading system of large ultra-precision machine[J]. Optics and Precision Engineering, 2007, 15(9): 1383
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