With the gradual improvement of optical instrument accuracy, the frequency of surface dynamic deformation events also shows a sharp increase trend, which is one of the main factors affecting and restricting the development and application of optical instruments. In order to meet the application requirements of optical instruments, a high-precision surface dynamic deformation measurement method for optical instruments based on machine vision technology is proposed. Using machine vision equipment to obtain high-precision optical instrument surface images, the surface images are grayed out, denoised, and enhanced. Based on this, the SURF feature detection algorithm is applied to extract the feature points of the surface image. The FLANN algorithm is used to match the feature points of adjacent images, and Delaunay triangulation is used to form a triangular mesh in the surface image area to further calculate the displacement and strain of the feature points of the surface image, Thus achieving high-precision measurement of surface dynamic deformation of optical instruments. Experimental data show that: When the horizontal coordinate is 1μm, the vertical coordinate of the surface dynamic deformation displacement obtained by the proposed method is 1.8μm, which is basically consistent with the actual displacement. When the experimental group is 6, the surface dynamic deformation strain value obtained by the proposed method is 3μm, which is consistent with the actual strain value, which fully proves that the proposed method has good application performance.