Yang ZHAO, Qiangxian HUANG. Effect of air squeeze film damping in multi-mode atomic force microscopy[J]. Optics and Precision Engineering, 2022, 30(19): 2362
- Optics and Precision Engineering
- Vol. 30, Issue 19, 2362 (2022)
Fig. 1. Schematic of simplified cantilever and sample model
Fig. 2. Functional block diagram of multi-mode AFM
Fig. 3. Head and base of multi-mode AFM system
Fig. 4. Approach curves of 0.2 N/m cantilever
Fig. 5. Approach curves of 3 N/m cantilever in fundamental resonance mode
Fig. 6. Approach curve of 3 N/m cantilever in second-order resonant mode
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Table 1. Test data of quality factor with squeeze film damping
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