• Infrared and Laser Engineering
  • Vol. 51, Issue 11, 20220735 (2022)
Shipei Dang1、2, Runze Li1, Meiling Zhou1, Jia Qian1, Dan Dan1, Xianghua Yu1, and Baoli Yao1、2
Author Affiliations
  • 1State Key Laboratory of Transient Optics and Photonics, Xi'an Institute of Optics and Precision Mechanics, Chinese Academy of Sciences, Xi'an 710119, China
  • 2University of Chinese Academy of Sciences, Beijing 100049, China
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    DOI: 10.3788/IRLA20220735 Cite this Article
    Shipei Dang, Runze Li, Meiling Zhou, Jia Qian, Dan Dan, Xianghua Yu, Baoli Yao. Discussion on spatial resolution of microscopic imaging system (invited)[J]. Infrared and Laser Engineering, 2022, 51(11): 20220735 Copy Citation Text show less

    Abstract

    Spatial resolution is a key specific parameter of the optical microscopic imaging system. According to the optical diffraction theory, the spatial resolution of imaging system is determined by the wavelength of illumination light and the numerical aperture of microscope objective. In the practical imaging process, the resolutions of microscopic imaging system obtained from different criteria are slightly different. It is necessary to select an appropriate criterion according to the coherence of light sources and the structural characteristics of obsversed targets to accurately calculate the resolutions of imaging system. In this paper, the calculation methods for spatial resolution under different conditions are provided via theoretical analysis and numerical simulation. Furthermore, we compare and discusse the difference of imaging resolutions under the illuminations of coherent and incoherent light sources for double points and double slits targets, respectively.
    Shipei Dang, Runze Li, Meiling Zhou, Jia Qian, Dan Dan, Xianghua Yu, Baoli Yao. Discussion on spatial resolution of microscopic imaging system (invited)[J]. Infrared and Laser Engineering, 2022, 51(11): 20220735
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