Fabrication of silica-on-silicon planar lightwave circuits by PECVD and ECR

Libing Zhou; Fengguang Luo; Mingcui Cao

Journals >Chinese Optics Letters >Volume 3 >Issue 5 >Page 05275 > Article

Chinese Optics Letters
Vol. 3, Issue 5, 05275 (2005)

Fabrication of silica-on-silicon planar lightwave circuits by PECVD and ECR

Libing Zhou^*, Fengguang Luo, and Mingcui Cao

Author Affiliations

State Key Laboratory of Laser Technology, Huazhong University of Science and Technology, Wuhan 430074

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Libing Zhou, Fengguang Luo, Mingcui Cao. Fabrication of silica-on-silicon planar lightwave circuits by PECVD and ECR[J]. Chinese Optics Letters, 2005, 3(5): 05275 Copy Citation Text

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References

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[4] S. W. Hsieh, C. Y. Chang, and S. C. Hsu, J. Appl. Phys. 74, 2638 (1993).

[5] R. Ulrich and R. Torge, Appl. Opt. 12, 2901 (1973).

[6] A. C. Adams, D. P. Schinke, and C. D. Capio, J. Electrochemical Soc. 126, 1539 (1979).

[7] L. Martinu and D. Poitras, J. Vac. Sci. Technol. A 18, 2619 (2000).

Libing Zhou, Fengguang Luo, Mingcui Cao. Fabrication of silica-on-silicon planar lightwave circuits by PECVD and ECR[J]. Chinese Optics Letters, 2005, 3(5): 05275

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