• Chinese Optics Letters
  • Vol. 3, Issue 12, 12712 (2005)
Wanghua Xiang1、*, Jie Liang1, Guizhong Zhang1, Lijun Wu2, K. S. Wong2, and G. K. L. Wong2
Author Affiliations
  • 1College of Precision Instrument and Optoelectronics Engineering, Key Laboratory of Optoelectronics Information Technical Science, EMC, Tianjin University, Tianjin 300072
  • 2Department of Physics, Hong Kong University of Science and Technology, Hong Kong
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    Wanghua Xiang, Jie Liang, Guizhong Zhang, Lijun Wu, K. S. Wong, G. K. L. Wong. Non-coplanar multi-beam interference produced by one triangular pyramid for fabricating photonic crystals[J]. Chinese Optics Letters, 2005, 3(12): 12712 Copy Citation Text show less

    Abstract

    A method for fabricating three-dimensional (3D) photonic crystals (PhCs) easily and simply, by using a visible light (~532 nm) to pass one triangular pyramid to form non-coplanar multi-beam interference, named laser interference etching technique, is reported. In the experiment, we exposed a 9-μm-thick photo-resist on the silicon substrate with exposure intensities of 150, 180, and 220 mJ/cm2, and produced the periodical nanostructures. Through varying a common angle in the triangular pyramid, other interference patterns can be obtained to fabricate various PhCs.
    Wanghua Xiang, Jie Liang, Guizhong Zhang, Lijun Wu, K. S. Wong, G. K. L. Wong. Non-coplanar multi-beam interference produced by one triangular pyramid for fabricating photonic crystals[J]. Chinese Optics Letters, 2005, 3(12): 12712
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