Yueke DING, Shihua HUANG. Study on Passivation of Monocrystalline Silicon by Tandem Hydrogenated Amorphous Silicon Film[J]. Acta Photonica Sinica, 2021, 50(3): 194
- Acta Photonica Sinica
- Vol. 50, Issue 3, 194 (2021)
Fig. 1. The influence of different hydrogen dilution ratio on passivation effect of amorphous silicon film
Fig. 2. Raman spectra of i-a-Si:H deposited by different hydrogen dilution ratio
Fig. 3. The influence of different annealing temperatures on carrier lifetime variation in the structure of i-a-Si:H/n-c-Si/i-a-Si:H
Fig. 4. Raman spectra of i-a-Si:H film in different annealing temperature
Fig. 5. Raman spectra of both monolayer and interlayer of amorphous silicon film
Fig. 6. The influence of monolayer and interlayer i-a-Si:H films on passivation effect of silicon wafer before and after annealing with different hydrogen dilution ratios
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