[1] TAKAMASU K, HIRAKI M, ENAMI K. Development of Nano-CMM and Parallel-CMM: CMM in the 21th Century $$R$$. International Dimensional Metrology Workshop, Tennessee, USA, 1999.

[2] FUJIWARA M, YAMAGUCHI A, TAKAMASU K. Evaluation of stages of Nano-CMM［M］. Netherlands: Kluwer Academic Publishers. 2001.

[3] JGER G, MANSKE E, HAUSOTTE T, et al.. The metrological basis and operation of nanopositioning and nanomeasuring machine NMM-1［J］. Tm-Technisches Messen,2009,76(5): 227-234.

[4] KNG A, MELI F, THALMANN R. Ultraprecision micro-CMM using a low force 3D touch probe［J］. Measurement Science and Technology, 2007, 18: 319-327.

[5] SPAAN H, WIDDERSHOVEN I, DONKER R. Design and calibration of "Isara 400" ultra-precision CMM［J］. Optics and Precision Engineering, 2011,19(9): 2236-2241.

[6] CHENG F, FEI Y T. Trigger control of touch probe for nano-CMM ［J］. Opt. Precision Eng., 2010,18(12)：2603-2609. (in Chinese)

[7] WANG CH CH. Study on the Structural Principle and Error Correction Technology of the Different types of CMM ［D］. Hefei: Hefei University of Technology , 2012. (in Chinese)

[8] ZHANG G X. Coordinate Measuring Machine ［M］. Tianjin: Tianjin University Press, 1999. (in Chinese)

[9] WANG L C, HUANG X D, DING H. Error analysis and compensation for touch trigger probe of on-machine measurement system ［J］. China Mechanical Engineering, 2012, 23(15): 1774-1778. (in Chinese)

[10] MICHIHATA M, NAKAI D, HAYASHI T, et al.. Nano-dimensional measurement using optically trapped probe enhanced by interferometric scale［C］. XIX IMEKO Word Congress Fundamental and Applied Metrology, Portugal, 2009: 1929-1934.