• Chinese Journal of Lasers
  • Vol. 31, Issue 12, 1487 (2004)
[in Chinese]*, [in Chinese], [in Chinese], [in Chinese], and [in Chinese]
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  • [in Chinese]
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    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Novel InP-Based Resonant Cavity Enhanced Photodetectors for Long-Wavelength Applications[J]. Chinese Journal of Lasers, 2004, 31(12): 1487 Copy Citation Text show less

    Abstract

    A novel long-wavelength InP-based resonant cavity enhanced (RCE) photodetector is introduced. High-reflectivity InP/air gap distributed Bragg reflectors (DBRs) have been fabricated by the selective wet etching of InGaAs sacrificial layers with FeCl3∶H2O solution. And the technique has been successfully applied to the fabrication of long-wavelength InP-based RCE photodetector. Thus the problem, the unachievable epitaxy of high-reflectivity InP/InGaAsP DBR, is resolved. The mesa area of this type RCE photodetector is 50 μm×50 μm, the bottom mirror is 1.5 pairs InP/air gap DBR, the interface reflection of the air and InGaAsP layer serves as the top mirror. The measurement results show that the quantum efficiency of 59% at 1.510 μm wavelength, the dark current of 2 nA at 3 V reverse bias, and the 3 dB bandwidth of 8 GHz have been achieved.
    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Novel InP-Based Resonant Cavity Enhanced Photodetectors for Long-Wavelength Applications[J]. Chinese Journal of Lasers, 2004, 31(12): 1487
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