A series of ferroelectric thin films of Bi_3.25Ce_0.75Ti₃O₁₂ (BCTO) was deposited on a composite substrate of Pt/Ti/SiO₂/Si through the sol-gel method, and the deposited films were irradiated with different doses of gamma rays. The crystal structure, surface morphology, ferroelectricity, leakage, and anti-fatigue properties of the deposited films before and after irradiation were compared by thermogravimetric differential scanning calorimetry (TG-DSC), X-ray diffraction (XRD), scanning electron microscope-energy dispersive spectrometer (SEM-EDS) and ferroelectric tester. The results showed that an increase in absorbed γ ray doses, didn't change the crystal structure of films. The ferroelectricity of the deposited films decreased significantly with the residual polarization 2Pr decreasing from 51.5 μC/cm² to 23.7 μC/cm². The leakage current density of the films increased slightly from 0.9×10^-7 A/cm² to 7.2×10^-7 A/cm². Some of the films showed fatigue performance after 10¹² polarization switching cycles.