Xing Zhou, Shumin Wang, Shucheng Xu, Jianqiu Ma, Lihua Lei, Zhishan Gao, Qun Yuan. Broadband Optical Interferometer for Topography Measurement with Large Field‐of‐View[J]. Chinese Journal of Lasers, 2023, 50(18): 1804001
- Chinese Journal of Lasers
- Vol. 50, Issue 18, 1804001 (2023)
Fig. 1. Interference structures diagrams. (a) Mirau interference structure; (b) Fizeau interference structure; (c) interference cavity structure combining Mireau and Fizeau types
Fig. 2. Optical structure of large field-of-view broadband optical interferometer system
Fig. 3. Conjugation diagram of illumination module
Fig. 4. Structure diagram of collimator
Fig. 5. Spot diagram of collimating lens
Fig. 6. Structure diagram of illumination module
Fig. 7. Structure diagram of the imaging lens
Fig. 8. Distortion of the imaging section
Fig. 9. Spot diagram of the imaging section
Fig. 10. MTF of the imaging section
Fig. 11. System diagram of broadband optical interferometer
Fig. 12. Test result of the resolution board. (a) Resolution test results graph; (b) three-dimensional morphology
Fig. 13. Test result of 7.805 μm standard step plate sample. (a) Two-dimensional morphology; (b) X-directional contour line
Fig. 14. Test result of 46.554 μm standard step plate sample. (a) Two-dimensional morphology; (b) X-directional contour line
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