Chang SONG, Xiao-jun YANG, Wei ZHAO, Yu-fei DUAN. Depth-micro Laser Drilling Methods Based on Spatial Light Modulator[J]. Acta Photonica Sinica, 2020, 49(8): 0814001
- Acta Photonica Sinica
- Vol. 49, Issue 8, 0814001 (2020)
Fig. 1. Schematics of microhole machining system based on SLM
Fig. 2. Focal spot size when the focus is moved to different position
Fig. 3. Phase diagram of Fresnel lens (unit:m)
Fig. 4. Surface of intensity distribution when the focus is moved to different position
Fig. 5. Micromachining on the sample
Fig. 6. Micromachining on the sample(2 mm)
Fig. 7. Micromachining on the sample (3 mm)
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Table 1. The influence of the change of focal position on the radius of the focal spot and the focal length of the Fresnel lens
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