• Acta Photonica Sinica
  • Vol. 43, Issue 10, 1006003 (2014)
JIANG Xiao-feng*, LIN Chun, XIE Hai-he, YAN Huang-ping, ZHANG Jian-cheng, and HUANG Yuan-qing
Author Affiliations
  • [in Chinese]
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    DOI: 10.3788/gzxb20144310.1006003 Cite this Article
    JIANG Xiao-feng, LIN Chun, XIE Hai-he, YAN Huang-ping, ZHANG Jian-cheng, HUANG Yuan-qing. Optic Fiber MEMS Pressure Sensor Based on White Light Interferometry[J]. Acta Photonica Sinica, 2014, 43(10): 1006003 Copy Citation Text show less
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    [2] WANG Q, WANG W, JIANG X, et al. Diaphragm-based extrinsic Fabry-Perot interferometric optical fiber pressure sensor[C]. 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies. International Society for Optics and Photonics, 2010: 76564V.

    [3] LUO Bin-bin, ZHAO Ming-fu, ZHOU Xiao-Jun, et al. Study on characteristics of refractive index sensor based on Ganssi-an-apodized fiber Bragg gratings[J]. Journal of Optoelectronics·Laser, 2011, 22(2): 201-206.

    [4] TANG Chang-ping, DENG Ming, ZHU Tao, et al. Photonic crystal fiber based M-Z interferometer for refractive index measurement[J]. Journal of Optoelectronics·Laser, 2011, 22(9): 1304-1308.

    [5] ZHANG Lei, YU Qing-xu. An improved demodulation method for F-P and FBG multiplexing system[J]. Journal of Optoelectronics·Laser, 2009, 20(8): 1008-1011.

    [6] LIU C. Foundations of MEMS[M]. Pearson Education India, 2006.

    [7] ZAOUK R, PARK B Y, MADOU M J. Introduction to microfabrication techniques[M]. Microfluidic Techniques. Humana Press, 2006: 5-15.

    [8] ZHAO Hong, LI Min, ZHANG Ying, et al. Characteristics of output signal of extrinsic fiber Fabry-Perot acoustic sensors[J]. Optics and Precision Engineering, 2008, 16(6): 1018-1024.

    [9] GE Yi-xian,WANG Ming,CHENG Xu-xing, et al. A novel Fabry-Perot MEMS Fiber pressure sensor based on intensity demodulation method interferometry[J]. Chinese Journal of Structural Chemistry, 2006, 19(05B): 1832-1834.

    [10] GE Yi-xian,WANG Ming,YAN Hai-tao, et al. MEMS pressure sensor based on a phased emodulation method[J]. Journal of Functional Materials and Devices, 2008, 14(2): 472-475.

    [11] WANG Ting-ting,WANG Ming,LI Ming, et al. Dual- wavelength demodulation and wavelength optimization for optical fiber fabry-pérot sensor[J]. Acta Optica Sinica, 2005, 25(10): 1297-1301.

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    [14] JIA Chun-yan,YU Qing-xu. Diaphragm based miniature fiber optic pressure sensor with F-P cavity[J]. Optics and Precision Engneering, 2009, 17(12): 2887-2892 .

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    JIANG Xiao-feng, LIN Chun, XIE Hai-he, YAN Huang-ping, ZHANG Jian-cheng, HUANG Yuan-qing. Optic Fiber MEMS Pressure Sensor Based on White Light Interferometry[J]. Acta Photonica Sinica, 2014, 43(10): 1006003
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