• Frontiers of Optoelectronics
  • Vol. 2, Issue 3, 308 (2009)
Yao CHEN1、2, Junbo FENG2, Zhiping ZHOU2、3、4、*, Christopher J. SUMMERS5, David S. CITRIN4、6, and Jun YU1
Author Affiliations
  • 1Department of Electronic Science and Technology, Huazhong University of Science and Technology, Wuhan 430074, China
  • 2Wuhan National Laboratory for Optoelectronics, Huazhong University of Science and Technology, Wuhan 430074, China
  • 3State Key Laboratory on Advanced Optical Communication Systems and Networks, Peking University, Beijing 100871, China
  • 4School of Electrical and Computer Engineering, Georgia Institute of Technology, Atlanta, GA 30332-0250, USA
  • 5School of Materials Science and Engineering, Georgia Institute of Technology, Atlanta, GA 30332-0245, USA
  • 6Unite Mixte Internationale 2958 Georgia Tech-CNRS, Georgia Tech Lorraine, Metz 57070, France
  • show less
    DOI: 10.1007/s12200-009-0049-1 Cite this Article
    Yao CHEN, Junbo FENG, Zhiping ZHOU, Christopher J. SUMMERS, David S. CITRIN, Jun YU. Simple technique to fabricate microscale and nanoscale silicon waveguide devices[J]. Frontiers of Optoelectronics, 2009, 2(3): 308 Copy Citation Text show less
    References

    [1] Pavesi L, Guillot G. Optical Interconnects—The Silicon Approach. New York: Springer-Verlag, 2006

    [2] Zhou Z P, Gao D S, Wang Y, Chen J L, Feng J B, Xia Z X, Chen Y. Nano-optoelectronics research in WNLO. In: Proceedings of 2006 Optics Valley of China International Symposium on Optoelectronics. Wuhan: IEEE, 2006, 8-11

    [3] Wahlbrink T, Mollenhauer T, Georgiev Y M, Henschel W, Efavi J K, Gottlob H D B, Lemme M C, Kurz H, Niehusmann J, Bolivar P H. Highly selective etch process for silicon-on-insulator nanodevices. Microelectronic Engineering, 2005, 78-79(special issue): 212-217

    [4] Welch C C, Goodyear A L,Wahlbrink T, Lemme MC, Mollenhauer T. Silicon etch process options for micro- and nanotechnology using inductively coupled plasmas. Microelectronic Engineering, 2006, 83(4-9): 1170-1173

    [5] Peyrade D, Chen Y, Talneau A, Patrini M, Galli M, Marabelli F, Agio M, Andreani L C, Silberstein E, Lalanne P. Fabrication and optical measurements of silicon on insulator photonic nanostructures. Microelectronic Engineering, 2002, 61-62: 529-536

    [6] Absil P P, Hryniewicz J V, Little B E,Wilson R A, Joneckis L G, Ho P T. Compact microring notch filters. IEEE Photonics Technology Letters, 2000, 12(4): 398-400

    [7] Little B E, Chu S T, Haus H A, Foresi J, Laine J P. Microring resonator channel dropping filters. Journal of Lightwave Technology, 1997, 15(6): 998-1005

    [8] Almeida V R, Barrios C A, Panepucci R R, Lipson M. All-optical control of light on a silicon chip. Nature, 2004, 431(7012): 1081-1084

    [9] Xu Q F, Schmidt B, Pradhan S, Lipson M. Micrometre-scale silicon electro-optic modulator. Nature, 2005, 435(7040): 325-327

    [10] Absil P P, Hryniewicz J V, Little B E, Cho P S, Wilson R A, Joneckis L G, Ho P T. Wavelength conversion in GaAs micro-ring resonators. Optics Letters, 2000, 25(8): 554-556

    [11] Bourdon G, Alibert G, Bequin A, Bellman B, Guiot E. Ultralow loss ring resonators using 3.5% index-contrast Ge-doped silica waveguides. IEEE Photonics Technology Letters, 2003, 15(5): 709-711

    [12] Rabiei P, Steier W H, Zhang C, Dalton L R. Polymer micro-ring filters and modulators. Journal of Lightwave Technology, 2002, 20(11): 1968-1975

    [13] Chen W Y, Grover R, Ibrahim TA, Van V, Ho P T. Compact singlemode benzocyclobutene microracetrack resonators. In: Proceedings of Integrated Photonics Research. Washington, D.C.: Optical Society of America, 2003, ITuG2

    [14] Kiyat I, Kocabas C, Aydinli A. Integrated micro ring resonator displacement sensor for scanning probe microscopies. Journal of Micromechanics and Microengineering, 2004, 14(3): 374-381

    [15] De Vos K, Bartolozzi I, Schacht E, Bienstman P, Baets R. Siliconon-insulator microring resonator for sensitive and label-free biosensing. Optics Express, 2007, 15(12): 7610-7615

    [16] Krioukov E, Klunder D J W, Driessen A, Greve J, Otto C. Sensor based on an integrated optical microcavity. Optics Letters, 2002, 27(7): 512-514

    [17] Ksendzov A, Lin Y. Integrated optics ring-resonator sensors for protein detection. Optics Letters, 2005, 30(24): 3344-3346

    [18] Guo J P, ShawMJ, Vawter G A, Hadley G R, Esherick P, Sullivan C T. High-Q microring resonator for biochemical sensors. Proceedings of SPIE, 2005, 5728: 83-92

    [19] Yalin A, Popat K C, Aldridge J C, Desai T A, Hryniewicz J, Chbouki N, Little B E, Oliver K, Van V, Chu S, Gill D, Anthes-Washburn M, Unlu M S, Goldberg B B. Optical sensing of biomolecules using microring resonators. IEEE Journal of Selected Topics in Quantum Electronics, 2006, 12(1): 148-155

    [20] Feng J B, Zhou Z P. High efficiency compact grating coupler for integrated optical circuits. Proceedings of SPIE, 2006, 6351: 63511H

    [21] Flamm D L. Mechanisms of silicon etching in fluorine-and-chlorinecontaining plasmas. Pure and Applied Chemistry, 1990, 62(9): 1709-1720

    Yao CHEN, Junbo FENG, Zhiping ZHOU, Christopher J. SUMMERS, David S. CITRIN, Jun YU. Simple technique to fabricate microscale and nanoscale silicon waveguide devices[J]. Frontiers of Optoelectronics, 2009, 2(3): 308
    Download Citation