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    Journals >Chinese Journal of Lasers >Volume 29 >Issue s1 >Page 500 > Article
    • Chinese Journal of Lasers
    • Vol. 29, Issue s1, 500 (2002)
    Study on Optical Thin Film Deposition Monitoring Method
    YANG Ming-hong1, LIU Jin-song1, and CHEN Qing-ming2
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    YANG Ming-hong, LIU Jin-song, CHEN Qing-ming. Study on Optical Thin Film Deposition Monitoring Method[J]. Chinese Journal of Lasers, 2002, 29(s1): 500 Copy Citation Text show less

    Abstract

    A new method of turn-point-value monitoring is provided in this paper. Deposition is stopped at a point which is senstative to film depth variation by designing and modulating monitoring wavelength. This method can be used to improve deposition monitoring accuracy.

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    YANG Ming-hong, LIU Jin-song, CHEN Qing-ming. Study on Optical Thin Film Deposition Monitoring Method[J]. Chinese Journal of Lasers, 2002, 29(s1): 500
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    Paper Information
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